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YTTRIUM OXIDE COATING FILM

An yttrium oxide coating has a porosity of 1.5% or less and contains monoclinic yttrium oxide at a ratio of 1% or more and 30% or less to the sum of monoclinic yttrium oxide and cubic yttrium oxide in the coating. The coating is formed, for example, by thermal spraying a thermal spraying material containing yttrium oxide particles and a dispersion medium.

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